Detoxifying exhaust gas from device production processes

A newly developed abatement system can be simply applied to exhaust gases containing flammable gases requiring nitrogen gas dilution other than silane gas by optimizing the processing conditions, without changing the device structure.

Transforming circles into squares

Researchers reconfigure material topology on the microscale.

3D-printed graphene aerogels for water treatment

Engineers report a new process of 3D printing graphene aerogels that they say overcomes two key hurdles - scalability and creating a version of the material that’s stable enough for repeated use - for water treatment.