Detoxifying exhaust gas from device production processes
A newly developed abatement system can be simply applied to exhaust gases containing flammable gases requiring nitrogen gas dilution other than silane gas by optimizing the processing conditions, without changing the device structure.
A newly developed abatement system can be simply applied to exhaust gases containing flammable gases requiring nitrogen gas dilution other than silane gas by optimizing the processing conditions, without changing the device structure.
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